Foundations of MEMS / Chang Liu.
Material type: TextSeries: Illinois ECE seriesPublication details: Upper Saddle River, NJ : Pearson Prentice Hall, c2006Edition: Int. edDescription: xxii, 530 p. : ill. ; 24 cmISBN: 9780131992047 (pbk.); 013199204X (pbk.)Subject(s): Microelectromechanical systemsDDC classification: 621.3 LOC classification: TK7875 | .C43 2006Item type | Current library | Collection | Call number | Copy number | Status | Date due | Barcode |
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General Circulation | APU Library Open Shelf | Book | TK7875 .C43 2006 c.1 (Browse shelf (Opens below)) | 1 | Available (No use restrictions) | 00029400 |
Includes bibliographical references and index.
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