Asia Pacific University Library catalogue


Foundations of MEMS / Chang Liu.

By: Chang, LiuMaterial type: TextTextSeries: Illinois ECE seriesPublication details: Upper Saddle River, NJ : Pearson Prentice Hall, c2006Edition: Int. edDescription: xxii, 530 p. : ill. ; 24 cmISBN: 9780131992047 (pbk.); 013199204X (pbk.)Subject(s): Microelectromechanical systemsDDC classification: 621.3 LOC classification: TK7875 | .C43 2006
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Includes bibliographical references and index.

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