| 000 | 01447cam a22003494a 4500 | ||
|---|---|---|---|
| 001 | 12346937 | ||
| 003 | APU | ||
| 005 | 20150810161047.0 | ||
| 008 | 010314s2001 enka b 001 0 eng | ||
| 010 | _a 2001024353 | ||
| 020 | _a047186109X (hbk.) | ||
| 020 | _a9780471861096 (hbk.) | ||
| 040 |
_aAPU _cAPU _dSARA _dANA _beng |
||
| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.G37 2001 |
| 082 | 0 | 0 |
_a621.381 _221 _bGAR 2001 |
| 100 | 1 |
_aGardner, J. W. _q(Julian W.), _d1958- _918057 |
|
| 245 | 1 | 0 |
_aMicrosensors, MEMS, and smart devices / _cJulian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. |
| 260 |
_aChichester ; _aNew York : _bJ. Wiley, _cc2001. |
||
| 300 |
_axvi, 503 p. : _bill. ; _c25 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems. _917117 |
|
| 650 | 0 |
_aDetectors. _916913 |
|
| 650 | 0 |
_aIntelligent control systems. _911822 |
|
| 700 | 1 |
_aVaradan, V. K., _d1943- _918058 |
|
| 700 | 1 |
_aAwadelkarim, Osama O. _918059 |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley034/2001024353.html |
| 856 | 4 |
_3Table of Contents _uhttp://www.loc.gov/catdir/toc/onix06/2001024353.html |
|
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
||
| 942 |
_2lcc _cBook |
||
| 999 |
_c9470 _d9470 |
||